Sublimation-Dissociation of Crystalline Germanium Nitride Ge3N4 and Preparation of Amorphous Oxynitride Films Ge3N4-xO1.5x
The question of detachment-sublimation of -α and β-modifications of germanium nitride and their combinations is considered. In the hotness range of 650-750oC it sublimates. In the range of ∼ (750–850)oC, prejudiced dissociation of Ge3N4 is noticed, which is followed by evaporation of the balance of the reliable phase. About 850oC and above Ge3N4 entirely dissociates. […]