MEMS power generator with transverse mode thin film PZT

A thin film lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), MEMS power generating device is developed. It is designed to resonate at specific frequencies from an external vibrational energy source, thereby creating electrical energy via the piezoelectric effect. Our cantilever device is designed to have a flat structure with a proof mass added to the end. [1]

Micro electret power generator

We present the first micromachined rotational electret power generator, linearized theoretical model of electret power generation, and novel method to produce uniformly charged electret. We also improved our previously developed (1996, 1999) thin film Teflon AF 1601-S electret technology with respect to dielectric thickness, charge uniformity, and processability. In demonstration, our prototype power generator successfully generated > 25/spl mu/W with electret thickness of 9/spl mu/m, effective charge density of -2.8/spl times/10/sup -4/C/m/sup 2/, and rotational speed of 4170RPM. [2]

A MEMS-based piezoelectric power generator array for vibration energy harvesting

Piezoelectric power generator made by microelectromechanical system (MEMS) technology can scavenge power from low-level ambient vibration sources. The developed MEMS power generators are featured with fixed/narrow operation frequency and power output in microwatt level, whereas, the frequency of ambient vibration is floating in some range, and power output is insufficient. In this paper, a power generator array based on thick-film piezoelectric cantilevers is investigated to improve frequency flexibility and power output. [3]

Effects of Fuel of Electric Power Generators on Soil Properties

Inadequate supply of energy to buildings has informed the use of service items like generators that depend on different types of fuel for its operations which are sources of pollution to various components of the environment. [4]

Energy Generation Using Thermoelectric Power Generator (TEPG) from the Living Body

In this paper, a general idea about wearable thermoelectric generator from the body heat has been discussed. First, a thermoelectric generator, which is usually used for industrial purposes (TellurexG2-40-0329 series), was used for lab experiment to observe the output results at the lowtemperature difference (i.e., ∆T=6-18 K). At this temperature range, the power output was approximately 0.0192-0.35 µW which was very low for practical use. Different configurations of TEG (single, double, single TEG with fin, etc.) were used to find out the best one, which could generate maximum power. [5]

 

Reference

[1] Jeon, Y.B., Sood, R., Jeong, J.H. and Kim, S.G., 2005. MEMS power generator with transverse mode thin film PZT. Sensors and Actuators A: Physical122(1), pp.16-22.

[2] Boland, J., Chao, Y.H., Suzuki, Y. and Tai, Y.C., 2003, January. Micro electret power generator. In The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE (pp. 538-541). IEEE.

[3] Liu, J.Q., Fang, H.B., Xu, Z.Y., Mao, X.H., Shen, X.C., Chen, D., Liao, H. and Cai, B.C., 2008. A MEMS-based piezoelectric power generator array for vibration energy harvesting. Microelectronics Journal39(5), pp.802-806.

[4] Wahab, A.B., Adesanya, D.A. and Ata, O., 2018. Effects of Fuel of Electric Power Generators on Soil Properties. Current Journal of Applied Science and Technology, pp.1-10.

[5] Siddique, A.R.M. and Majid, S.H., 2016. Energy Generation Using Thermoelectric Power Generator (TEPG) from the Living Body. Physical Science International Journal, pp.1-15.

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