It is now possible to construct a cross-sectional transmission electron microscopy (TEM) specimen of a thin film multilayer sample using a cross-beam scanning electron microscopy (SEM)/focused-ion-beam (FIB) system, which was recently introduced. A 300 layer pair thin-film multilayer sample of W/B4C was used to show the specimen lift-out approach, which took substantially less time than the traditional cross-sectional sample preparation technique. The FIB sample is followed by Ar+ ion polishing at 2 kV with grazing incidence to achieve a large area electron transparent sample. The prepared cross-sectional sample was examined using a transmission electron microscope.
Author (s) Details
Puspen Mondal
Raja Ramanna Centre for Advanced Technology, Indore, India.
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